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Simulation and iterative deconvolution of residual gas spectra
Residual gas analysis may be time consuming if the identification of all gas species and their quantitative contribution to the mass spectrum is required. This is because the partial pressures of the residual gas cover several orders of magnitudes and fragmentation patterns are in general convoluted...
Autores principales: | , , |
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Lenguaje: | eng |
Publicado: |
2021
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/j.vacuum.2020.109876 http://cds.cern.ch/record/2747763 |