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Effective Target Speed-Reduction Techniques for Industrial Interferometers
In recent years the cost, size and complexity of use of interferometers have reduced to an extent where they are now more employable in industrial applications, where their high precision and contactless measurement benefits are needed. A limitation in many industrial interferometers, however, is th...
Autores principales: | , , , |
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Lenguaje: | eng |
Publicado: |
2019
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1109/IECON.2019.8926756 http://cds.cern.ch/record/2762124 |