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Vertically Integrated System with Microfabricated 3D Sensors and CO$_2$ Microchannel Cooling
The growing demand for miniaturized radiation tolerant detection systems with fast responses and high-power budgets, has increased the necessity for smart and efficient cooling solutions. Several groups have been successfully implementing silicon microfabrication to process superficial microchannels...
| Autores principales: | , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2021
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.3389/fphy.2021.633970 http://cds.cern.ch/record/2767771 |