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Vertically Integrated System with Microfabricated 3D Sensors and CO$_2$ Microchannel Cooling

The growing demand for miniaturized radiation tolerant detection systems with fast responses and high-power budgets, has increased the necessity for smart and efficient cooling solutions. Several groups have been successfully implementing silicon microfabrication to process superficial microchannels...

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Detalles Bibliográficos
Autores principales:	Da Via, Cinzia, Petagna, Paolo, Romagnoli, Giulia, Hellenschmidt, Desiree, Munoz-Sanchez, Francisca, Dann, Nicholas
Lenguaje:	eng
Publicado:	2021
Materias:	Accelerators and Storage Rings
Acceso en línea:	https://dx.doi.org/10.3389/fphy.2021.633970 http://cds.cern.ch/record/2767771

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