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Technology development of p-type microstrip detectors with radiation hard p-spray isolation

A technology for the fabrication of p-type microstrip silicon radiation detectors using p-spray implant isolation has been developed at CNM-IMB. The p-spray isolation has been optimized in order to withstand a gamma irradiation dose up to 50 Mrad (Si), which represents the ionization radiation dose...

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Detalles Bibliográficos
Autores principales: Pellegrini, G, Fleta, C, Campabadal, F, Díez, S, Lozano, M, Rafí, J M, Ullán, M
Lenguaje:eng
Publicado: 2006
Materias:
Acceso en línea:https://dx.doi.org/10.1016/j.nima.2006.07.005
http://cds.cern.ch/record/2635129