Microstructure Evolution with Rapid Thermal Annealing Time in (001)-Oriented Piezoelectric PZT Films Integrated on (111) Si

In our recently published paper (Y.-Y. Wang et al., High performance LaNiO(3)-buffered, (001)-oriented PZT piezoelectric films integrated on (111) Si, Appl. Phys. Lett. 121, 182902, 2022), highly (001)-oriented PZT films with a large transverse piezoelectric coefficient e(31,f) prepared on (111) Si...

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Detalles Bibliográficos
Autores principales: Wang, Yingying, Zhu, Hanfei, Xue, Yinxiu, Yan, Peng, Ouyang, Jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10003855/
https://www.ncbi.nlm.nih.gov/pubmed/36903182
http://dx.doi.org/10.3390/ma16052068

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10003855/
https://www.ncbi.nlm.nih.gov/pubmed/36903182
http://dx.doi.org/10.3390/ma16052068

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