Acoustic Performance of Stress Gradient-Induced Deflection of Triangular Unimorphic/Bimorphic Cantilevers for MEMS Applications

This paper reports two piezoelectric materials of lead zirconium titanate (PZT) and aluminum nitride (AlN) used to simulate microelectromechanical system (MEMS) speakers, which inevitably suffered deflections as induced via the stress gradient during the fabrication processes. The main issue is the...

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Detalles Bibliográficos
Autores principales: Yuan, Ning-Hsiu, Chen, Chih-Chia, Fuh, Yiin-Kuen, Li, Tomi T.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004114/
https://www.ncbi.nlm.nih.gov/pubmed/36903244
http://dx.doi.org/10.3390/ma16052129

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004114/
https://www.ncbi.nlm.nih.gov/pubmed/36903244
http://dx.doi.org/10.3390/ma16052129

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