Cargando…
Acoustic Performance of Stress Gradient-Induced Deflection of Triangular Unimorphic/Bimorphic Cantilevers for MEMS Applications
This paper reports two piezoelectric materials of lead zirconium titanate (PZT) and aluminum nitride (AlN) used to simulate microelectromechanical system (MEMS) speakers, which inevitably suffered deflections as induced via the stress gradient during the fabrication processes. The main issue is the...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004114/ https://www.ncbi.nlm.nih.gov/pubmed/36903244 http://dx.doi.org/10.3390/ma16052129 |