Doping Engineering for Optimizing Piezoelectric and Elastic Performance of AlN

The piezoelectric and elastic properties are critical for the performance of AlN-based 5G RF filters. The improvement of the piezoelectric response in AlN is often accompanied by lattice softening, which compromises the elastic modulus and sound velocities. Optimizing both the piezoelectric and elas...

Descripción completa

Detalles Bibliográficos
Autores principales: Yu, Xi, Zhu, Lei, Li, Xin, Zhao, Jia, Wu, Tingjun, Yu, Wenjie, Li, Weimin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004460/
https://www.ncbi.nlm.nih.gov/pubmed/36902894
http://dx.doi.org/10.3390/ma16051778

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004460/
https://www.ncbi.nlm.nih.gov/pubmed/36902894
http://dx.doi.org/10.3390/ma16051778

Ejemplares similares