The Effect of Periodic Duty Cyclings in Metal-Modulated Epitaxy on GaN:Mg Film

Metal modulation epitaxy (MME) is a technique in which metal beams (Al, Ga, In, and Mg) are switched on and off in short periods in an RF MBE system while a continuous nitrogen plasma beam is kept on. We systematically studied the effect of periodic duty cycling on the morphology, crystalline qualit...

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Detalles Bibliográficos
Autores principales: Fang, Jun, Yang, Wenxian, Zhang, Xue, Tian, Aiqin, Lu, Shulong, Liu, Jianping, Yang, Hui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004518/
https://www.ncbi.nlm.nih.gov/pubmed/36837358
http://dx.doi.org/10.3390/ma16041730

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004518/
https://www.ncbi.nlm.nih.gov/pubmed/36837358
http://dx.doi.org/10.3390/ma16041730

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