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The Effect of Periodic Duty Cyclings in Metal-Modulated Epitaxy on GaN:Mg Film
Metal modulation epitaxy (MME) is a technique in which metal beams (Al, Ga, In, and Mg) are switched on and off in short periods in an RF MBE system while a continuous nitrogen plasma beam is kept on. We systematically studied the effect of periodic duty cycling on the morphology, crystalline qualit...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004518/ https://www.ncbi.nlm.nih.gov/pubmed/36837358 http://dx.doi.org/10.3390/ma16041730 |