In Situ Synchrotron XRD Characterization of Piezoelectric Al(1−x)Sc(x)N Thin Films for MEMS Applications

Aluminum scandium nitride (Al(1−x)Sc(x)N) film has drawn considerable attention owing to its enhanced piezoelectric response for micro-electromechanical system (MEMS) applications. Understanding the fundamentals of piezoelectricity would require a precise characterization of the piezoelectric coeffi...

Descripción completa

Detalles Bibliográficos
Autores principales: Jiang, Wenzheng, Zhu, Lei, Chen, Lingli, Yang, Yumeng, Yu, Xi, Li, Xiaolong, Mu, Zhiqiang, Yu, Wenjie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004546/
https://www.ncbi.nlm.nih.gov/pubmed/36902897
http://dx.doi.org/10.3390/ma16051781

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004546/
https://www.ncbi.nlm.nih.gov/pubmed/36902897
http://dx.doi.org/10.3390/ma16051781

Ejemplares similares