Cargando…

In Situ Synchrotron XRD Characterization of Piezoelectric Al(1−x)Sc(x)N Thin Films for MEMS Applications

Aluminum scandium nitride (Al(1−x)Sc(x)N) film has drawn considerable attention owing to its enhanced piezoelectric response for micro-electromechanical system (MEMS) applications. Understanding the fundamentals of piezoelectricity would require a precise characterization of the piezoelectric coeffi...

Descripción completa

Detalles Bibliográficos
Autores principales:	Jiang, Wenzheng, Zhu, Lei, Chen, Lingli, Yang, Yumeng, Yu, Xi, Li, Xiaolong, Mu, Zhiqiang, Yu, Wenjie
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10004546/ https://www.ncbi.nlm.nih.gov/pubmed/36902897 http://dx.doi.org/10.3390/ma16051781

Ejemplares similares

Structural Evolution of Ag-LEV Zeolite upon Heating: An In Situ Single-Crystal X-ray Diffraction (SC-XRD) and X-ray Absorption Spectroscopy (XAS) Study
por: Cametti, Georgia, et al.
Publicado: (2020)

Superconducting Nd(1−x)Eu(x)NiO(2) thin films using in situ synthesis
por: Wei, Wenzheng, et al.
Publicado: (2023)

Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
por: Fischeneder, Martin, et al.
Publicado: (2018)

Circular test structure for the determination of piezoelectric constants of Sc(x)Al(1−x)N thin films applying Laser Doppler Vibrometry and FEM simulations()
por: Mayrhofer, P.M., et al.
Publicado: (2015)

Kinetics of Carbon Enrichment in Austenite during Partitioning Stage Studied via In-Situ Synchrotron XRD
por: Forouzan, Farnoosh, et al.
Publicado: (2023)

Al(1−x)Sc(x)N Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
por: Wolff, Niklas, et al.
Publicado: (2022)

A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
por: Yang, Jian, et al.
Publicado: (2019)

Piezoelectric Properties of Pb(1−x)La(x)(Zr(0.52)Ti(0.48))(1−x/4)O(3) Thin Films Studied by In Situ X-ray Diffraction
por: Cornelius, Thomas W., et al.
Publicado: (2020)

Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator
por: Awad, Mohammed, et al.
Publicado: (2023)

Piezoelectric MEMS resonators
por: Bhugra, Harmeet, et al.
Publicado: (2017)

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
por: Liu, Yichen, et al.
Publicado: (2022)

Fast X-ray diffraction (XRD) tomography for enhanced identification of materials
por: Korolkovas, Airidas
Publicado: (2022)

Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator
por: Awad, Mohammed, et al.
Publicado: (2023)

Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure
por: Liu, Jiacheng, et al.
Publicado: (2020)

Quantitative Deviation of Nanocrystals Using the RIR Method in X-ray Diffraction (XRD)
por: Huang, Qinyuan, et al.
Publicado: (2022)

Pair distribution functions of amorphous organic thin films from synchrotron X-ray scattering in transmission mode
por: Shi, Chenyang, et al.
Publicado: (2017)

Editorial for the Special Issue on Piezoelectric MEMS
por: Schmid, Ulrich, et al.
Publicado: (2018)

In situ synchrotron X-ray multimodal experiment to study polycrystal plasticity
por: Ribart, Clement, et al.
Publicado: (2023)

In-situ growth of superconducting SmO(1−x)F(x)FeAs thin films by pulsed laser deposition
por: Haindl, Silvia, et al.
Publicado: (2016)

Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies
por: Hwang, Jeong-Yeon, et al.
Publicado: (2023)

Stretchable piezoelectric biocrystal thin films
por: Li, Jun, et al.
Publicado: (2023)

Understanding the Polymorphism of Cobalt Nanoparticles Formed in Electrodeposition—An In Situ XRD Study
por: Ma, Xuetian, et al.
Publicado: (2023)

In situ synchrotron X-ray scission of polytetrafluoroethylene chains and elucidation of dry etching
por: Fujitani, Kaito, et al.
Publicado: (2023)

Piezoelectric MEMS Resonators for Cigarette Particle Detection
por: Toledo, Javier, et al.
Publicado: (2019)

Dynamic piezoelectric MEMS-based optical metasurfaces
por: Meng, Chao, et al.
Publicado: (2021)

Synthesis, spectroscopic, SC-XRD/DFT and non-linear optical (NLO) properties of chromene derivatives
por: Arif, Nadia, et al.
Publicado: (2022)

Metastable phase formation of Pt-X (X = Ir, Au) thin films
por: Saksena, Aparna, et al.
Publicado: (2018)

Anion‐Dependent Polarization and Piezoelectric Power Generation in Hybrid Halide MAPbX(3) (X = I, Br, and Cl) Thin Films with Out‐of‐Plane Structural Adjustments
por: Kim, Da Bin, et al.
Publicado: (2022)

High temperature in-situ synchrotron-based XRD study on the crystal structure evolution of C/C composite impregnated by FLiNaK molten salt
por: Feng, Shanglei, et al.
Publicado: (2017)

Environmental cell for in situ X-ray synchrotron micro-CT imaging with simultaneous acoustic measurements
por: Drobchik, Arkady N., et al.
Publicado: (2022)

Influence of Cation (RE = Sc, Y, Gd) and O/H Anion Ratio on the Photochromic Properties of REO(x)H(3–2x) Thin Films
por: Colombi, Giorgio, et al.
Publicado: (2021)

Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
por: Žukauskaitė, Agnė
Publicado: (2023)

Memory Effect on a LDH/zeolite A Composite: An XRD In Situ Study
por: Bezerra, Breno G. P., et al.
Publicado: (2021)

Impact failure in two silicates revealed by ultrafast, in situ, synchrotron X-ray microscopy
por: Bourne, N. K., et al.
Publicado: (2020)

An electric field cell for performing in situ single-crystal synchrotron X-ray diffraction
por: Saunders, Lucy K., et al.
Publicado: (2021)

Oxidation of Micro- and Nanograined UO(2) Pellets by In Situ Synchrotron X-ray Diffraction
por: De Bona, Emanuele, et al.
Publicado: (2022)

Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing
por: Chellasivalingam, Malar, et al.
Publicado: (2020)

A Piezoelectric MEMS Microgripper for Arbitrary XY Trajectory
por: Botta, Fabio
Publicado: (2022)

Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators
por: Rabih, Almur A. S., et al.
Publicado: (2023)

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones
por: Shi, Shuzheng, et al.
Publicado: (2023)

Cannot write session to /tmp/vufind_sessions/sess_jc4r6ono38k2o58fdnj335c8ve