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Enhancement of the Electroluminescence from Amorphous Er-Doped Al(2)O(3) Nanolaminate Films by Y(2)O(3) Cladding Layers Using Atomic Layer Deposition
Amorphous Al(2)O(3)-Y(2)O(3):Er nanolaminate films are fabricated on silicon by atomic layer deposition, and ~1530 nm electroluminescence (EL) is obtained from the metal-oxide-semiconductor light-emitting devices based on these nanofilms. The introduction of Y(2)O(3) into Al(2)O(3) reduces the elect...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10005131/ https://www.ncbi.nlm.nih.gov/pubmed/36903727 http://dx.doi.org/10.3390/nano13050849 |