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Enhancement of the Electroluminescence from Amorphous Er-Doped Al(2)O(3) Nanolaminate Films by Y(2)O(3) Cladding Layers Using Atomic Layer Deposition

Amorphous Al(2)O(3)-Y(2)O(3):Er nanolaminate films are fabricated on silicon by atomic layer deposition, and ~1530 nm electroluminescence (EL) is obtained from the metal-oxide-semiconductor light-emitting devices based on these nanofilms. The introduction of Y(2)O(3) into Al(2)O(3) reduces the elect...

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Detalles Bibliográficos
Autores principales:	Yang, Yang, Pei, Haiyan, Ye, Zejun, Sun, Jiaming
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10005131/ https://www.ncbi.nlm.nih.gov/pubmed/36903727 http://dx.doi.org/10.3390/nano13050849

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