All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss

Compared to the widely used compound semiconductor photoelectric sensors, all-silicon photoelectric sensors have the advantage of easy mass production because they are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. In this paper, we propose an all-silicon p...

Descripción completa

Detalles Bibliográficos
Autores principales: Tang, Yu, Luo, Qian, Chen, Yuxing, Xu, Kaikai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10005702/
https://www.ncbi.nlm.nih.gov/pubmed/36903792
http://dx.doi.org/10.3390/nano13050914

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10005702/
https://www.ncbi.nlm.nih.gov/pubmed/36903792
http://dx.doi.org/10.3390/nano13050914

Ejemplares similares