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All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss
Compared to the widely used compound semiconductor photoelectric sensors, all-silicon photoelectric sensors have the advantage of easy mass production because they are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. In this paper, we propose an all-silicon p...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10005702/ https://www.ncbi.nlm.nih.gov/pubmed/36903792 http://dx.doi.org/10.3390/nano13050914 |