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Design and Analysis of a Fluid-Filled RF MEMS Switch

In the present study, a fluid-filled RF MEMS (Radio Frequency Micro-Electro-Mechanical Systems) switch is proposed and designed. In the analysis of the operating principle of the proposed switch, air, water, glycerol and silicone oil were adopted as filling dielectric to simulate and research the in...

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Detalles Bibliográficos
Autores principales: Zhu, Hongyu, Cui, Wenhao, Li, Yanzhang, Song, Mingxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10006869/
https://www.ncbi.nlm.nih.gov/pubmed/36904895
http://dx.doi.org/10.3390/s23052692