A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film

In order to improve the response characteristics of the surface acoustic wave (SAW) sensor to trace gases, a SAW CO gas sensor based on a Pd–Pt/SnO(2)/Al(2)O(3) film with a high-frequency response performance is proposed in this paper. The gas sensitivity and humidity sensitivity of trace CO gas are...

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Detalles Bibliográficos
Autores principales: Yang, Haiyang, Shen, Bin, Liu, Xinlei, Jin, Chunbo, Zhou, Tianshun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007527/
https://www.ncbi.nlm.nih.gov/pubmed/36904690
http://dx.doi.org/10.3390/s23052487

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007527/
https://www.ncbi.nlm.nih.gov/pubmed/36904690
http://dx.doi.org/10.3390/s23052487

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