Study on the Hierarchical Predictive Control of Semiconductor Silicon Single Crystal Quality Based on the Soft Sensor Model

Silicon single crystal (SSC) quality monitoring and control has been a hot research topic in the field of the Czochralski crystal growth process. Considering that the traditional SSC control method ignores the crystal quality factor, this paper proposes a hierarchical predictive control strategy bas...

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Detalles Bibliográficos
Autores principales: Wan, Yin, Liu, Ding, Ren, Jun-Chao, Wu, Shi-Hai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007613/
https://www.ncbi.nlm.nih.gov/pubmed/36905036
http://dx.doi.org/10.3390/s23052830

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007613/
https://www.ncbi.nlm.nih.gov/pubmed/36905036
http://dx.doi.org/10.3390/s23052830

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