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Wafer-scale integration of GaAs/AlGaAs core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy

GaAs/AlGaAs core–shell nanowires, typically having 250 nm diameter and 6 μm length, were grown on 2-inch Si wafers by the single process of molecular beam epitaxy using constituent Ga-induced self-catalysed vapor–liquid–solid growth. The growth was carried out without specific pre-treatment such as...

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Autores principales: Minehisa, Keisuke, Murakami, Ryo, Hashimoto, Hidetoshi, Nakama, Kaito, Sakaguchi, Kenta, Tsutsumi, Rikuo, Tanigawa, Takeru, Yukimune, Mitsuki, Nagashima, Kazuki, Yanagida, Takeshi, Sato, Shino, Hiura, Satoshi, Murayama, Akihiro, Ishikawa, Fumitaro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10012865/
https://www.ncbi.nlm.nih.gov/pubmed/36926567
http://dx.doi.org/10.1039/d2na00848c
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author Minehisa, Keisuke
Murakami, Ryo
Hashimoto, Hidetoshi
Nakama, Kaito
Sakaguchi, Kenta
Tsutsumi, Rikuo
Tanigawa, Takeru
Yukimune, Mitsuki
Nagashima, Kazuki
Yanagida, Takeshi
Sato, Shino
Hiura, Satoshi
Murayama, Akihiro
Ishikawa, Fumitaro
author_facet Minehisa, Keisuke
Murakami, Ryo
Hashimoto, Hidetoshi
Nakama, Kaito
Sakaguchi, Kenta
Tsutsumi, Rikuo
Tanigawa, Takeru
Yukimune, Mitsuki
Nagashima, Kazuki
Yanagida, Takeshi
Sato, Shino
Hiura, Satoshi
Murayama, Akihiro
Ishikawa, Fumitaro
author_sort Minehisa, Keisuke
collection PubMed
description GaAs/AlGaAs core–shell nanowires, typically having 250 nm diameter and 6 μm length, were grown on 2-inch Si wafers by the single process of molecular beam epitaxy using constituent Ga-induced self-catalysed vapor–liquid–solid growth. The growth was carried out without specific pre-treatment such as film deposition, patterning, and etching. The outermost Al-rich AlGaAs shells form a native oxide surface protection layer, which provides efficient passivation with elongated carrier lifetime. The 2-inch Si substrate sample exhibits a dark-colored feature due to the light absorption of the nanowires where the reflectance in the visible wavelengths is less than 2%. Homogeneous and optically luminescent and adsorptive GaAs-related core–shell nanowires were prepared over the wafer, showing the prospect for large-volume III–V heterostructure devices available with this approach as complementary device technologies for integration with silicon.
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spelling pubmed-100128652023-03-15 Wafer-scale integration of GaAs/AlGaAs core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy Minehisa, Keisuke Murakami, Ryo Hashimoto, Hidetoshi Nakama, Kaito Sakaguchi, Kenta Tsutsumi, Rikuo Tanigawa, Takeru Yukimune, Mitsuki Nagashima, Kazuki Yanagida, Takeshi Sato, Shino Hiura, Satoshi Murayama, Akihiro Ishikawa, Fumitaro Nanoscale Adv Chemistry GaAs/AlGaAs core–shell nanowires, typically having 250 nm diameter and 6 μm length, were grown on 2-inch Si wafers by the single process of molecular beam epitaxy using constituent Ga-induced self-catalysed vapor–liquid–solid growth. The growth was carried out without specific pre-treatment such as film deposition, patterning, and etching. The outermost Al-rich AlGaAs shells form a native oxide surface protection layer, which provides efficient passivation with elongated carrier lifetime. The 2-inch Si substrate sample exhibits a dark-colored feature due to the light absorption of the nanowires where the reflectance in the visible wavelengths is less than 2%. Homogeneous and optically luminescent and adsorptive GaAs-related core–shell nanowires were prepared over the wafer, showing the prospect for large-volume III–V heterostructure devices available with this approach as complementary device technologies for integration with silicon. RSC 2023-01-23 /pmc/articles/PMC10012865/ /pubmed/36926567 http://dx.doi.org/10.1039/d2na00848c Text en This journal is © The Royal Society of Chemistry https://creativecommons.org/licenses/by/3.0/
spellingShingle Chemistry
Minehisa, Keisuke
Murakami, Ryo
Hashimoto, Hidetoshi
Nakama, Kaito
Sakaguchi, Kenta
Tsutsumi, Rikuo
Tanigawa, Takeru
Yukimune, Mitsuki
Nagashima, Kazuki
Yanagida, Takeshi
Sato, Shino
Hiura, Satoshi
Murayama, Akihiro
Ishikawa, Fumitaro
Wafer-scale integration of GaAs/AlGaAs core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy
title Wafer-scale integration of GaAs/AlGaAs core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy
title_full Wafer-scale integration of GaAs/AlGaAs core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy
title_fullStr Wafer-scale integration of GaAs/AlGaAs core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy
title_full_unstemmed Wafer-scale integration of GaAs/AlGaAs core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy
title_short Wafer-scale integration of GaAs/AlGaAs core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy
title_sort wafer-scale integration of gaas/algaas core–shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy
topic Chemistry
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10012865/
https://www.ncbi.nlm.nih.gov/pubmed/36926567
http://dx.doi.org/10.1039/d2na00848c
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