Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. Howe...

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Detalles Bibliográficos
Autores principales: Dong, Zihao, He, Qipei, Shen, Dawei, Gong, Zheng, Zhang, Deyuan, Zhang, Wenqiang, Ono, Takahito, Jiang, Yonggang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Review Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10030833/
https://www.ncbi.nlm.nih.gov/pubmed/36969964
http://dx.doi.org/10.1038/s41378-023-00503-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10030833/
https://www.ncbi.nlm.nih.gov/pubmed/36969964
http://dx.doi.org/10.1038/s41378-023-00503-5

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