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Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. Howe...

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Autores principales: Dong, Zihao, He, Qipei, Shen, Dawei, Gong, Zheng, Zhang, Deyuan, Zhang, Wenqiang, Ono, Takahito, Jiang, Yonggang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10030833/
https://www.ncbi.nlm.nih.gov/pubmed/36969964
http://dx.doi.org/10.1038/s41378-023-00503-5
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author Dong, Zihao
He, Qipei
Shen, Dawei
Gong, Zheng
Zhang, Deyuan
Zhang, Wenqiang
Ono, Takahito
Jiang, Yonggang
author_facet Dong, Zihao
He, Qipei
Shen, Dawei
Gong, Zheng
Zhang, Deyuan
Zhang, Wenqiang
Ono, Takahito
Jiang, Yonggang
author_sort Dong, Zihao
collection PubMed
description Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication. The aims of this review are to systematically discuss polyimide microfabrication techniques, which cover film formation, material conversion, micropatterning, 3D microfabrication, and their applications. With an emphasis on polyimide-based flexible MEMS devices, we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field. [Image: see text]
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spelling pubmed-100308332023-03-23 Microfabrication of functional polyimide films and microstructures for flexible MEMS applications Dong, Zihao He, Qipei Shen, Dawei Gong, Zheng Zhang, Deyuan Zhang, Wenqiang Ono, Takahito Jiang, Yonggang Microsyst Nanoeng Review Article Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication. The aims of this review are to systematically discuss polyimide microfabrication techniques, which cover film formation, material conversion, micropatterning, 3D microfabrication, and their applications. With an emphasis on polyimide-based flexible MEMS devices, we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field. [Image: see text] Nature Publishing Group UK 2023-03-21 /pmc/articles/PMC10030833/ /pubmed/36969964 http://dx.doi.org/10.1038/s41378-023-00503-5 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Review Article
Dong, Zihao
He, Qipei
Shen, Dawei
Gong, Zheng
Zhang, Deyuan
Zhang, Wenqiang
Ono, Takahito
Jiang, Yonggang
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications
title Microfabrication of functional polyimide films and microstructures for flexible MEMS applications
title_full Microfabrication of functional polyimide films and microstructures for flexible MEMS applications
title_fullStr Microfabrication of functional polyimide films and microstructures for flexible MEMS applications
title_full_unstemmed Microfabrication of functional polyimide films and microstructures for flexible MEMS applications
title_short Microfabrication of functional polyimide films and microstructures for flexible MEMS applications
title_sort microfabrication of functional polyimide films and microstructures for flexible mems applications
topic Review Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10030833/
https://www.ncbi.nlm.nih.gov/pubmed/36969964
http://dx.doi.org/10.1038/s41378-023-00503-5
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