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Bonding of PMMA to silicon by femtosecond laser pulses
Many devices and objects, from microelectronics to microfluidics, consist of parts made from dissimilar materials, such as different polymers, metals or semiconductors. Techniques for joining such hybrid micro-devices, generally, are based on gluing or thermal processes, which all present some drawb...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10049991/ https://www.ncbi.nlm.nih.gov/pubmed/36977765 http://dx.doi.org/10.1038/s41598-023-31969-y |