Structure Performance Correlation of N-Heterocyclic Oligomer Leveler for Acid Copper Plating of Advanced Interconnects

Levelers, as an essential part of organic additives in copper electroplating, play a crucial role in the fabrication of sophisticated interconnects in integrated circuits, packaging substrates, and printed circuit boards. In this work, four N-heterocyclic oligomers were synthesized and characterized...

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Detalles Bibliográficos
Autores principales: Peng, Chuan, Zhai, Yuehui, Chen, Xianming, Wang, Chong, Hong, Yan, Chen, Yuanming, He, Wei, Zhou, Guoyun, Liu, Binyun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051102/
https://www.ncbi.nlm.nih.gov/pubmed/36985756
http://dx.doi.org/10.3390/molecules28062783

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051102/
https://www.ncbi.nlm.nih.gov/pubmed/36985756
http://dx.doi.org/10.3390/molecules28062783

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