Design and Test of a Spatial Nanopositioner for Evaluating the Out-of-Focus-Plane Performance of Micro-Vision

Micro-vision possesses high in-focus-plane motion tracking accuracy. Unfortunately, out-of-focus-plane displacements cannot be avoided, decreasing the in-focus-plane tracking accuracy of micro-vision. In this paper, a spatial nanopositioner is proposed to evaluate the out-of-focus-plane performance...

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Detalles Bibliográficos
Autores principales: Wang, Ruizhou, Wu, Heng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051271/
https://www.ncbi.nlm.nih.gov/pubmed/36984920
http://dx.doi.org/10.3390/mi14030513

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051271/
https://www.ncbi.nlm.nih.gov/pubmed/36984920
http://dx.doi.org/10.3390/mi14030513

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