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Design and Test of a Spatial Nanopositioner for Evaluating the Out-of-Focus-Plane Performance of Micro-Vision
Micro-vision possesses high in-focus-plane motion tracking accuracy. Unfortunately, out-of-focus-plane displacements cannot be avoided, decreasing the in-focus-plane tracking accuracy of micro-vision. In this paper, a spatial nanopositioner is proposed to evaluate the out-of-focus-plane performance...
Autores principales: | Wang, Ruizhou, Wu, Heng |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051271/ https://www.ncbi.nlm.nih.gov/pubmed/36984920 http://dx.doi.org/10.3390/mi14030513 |
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