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Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems
In high-power laser systems, the primary cause of contamination of optical components and degradation of spatial cleanliness is laser-induced sputtering of particles. To mitigate this problem, laminar flow is frequently utilized to control the direction and transport of these particles. This study c...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051549/ https://www.ncbi.nlm.nih.gov/pubmed/36985007 http://dx.doi.org/10.3390/mi14030598 |