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Treatment of Semiconductor Wastewater Containing Tetramethylammonium Hydroxide (TMAH) Using Nanofiltration, Reverse Osmosis, and Membrane Capacitive Deionization

As the semiconductor industry has grown tremendously over the last decades, its environmental impact has become a growing concern, including the withdrawal of fresh water and the generation of harmful wastewater. Tetramethylammonium hydroxide (TMAH), one of the toxic compounds inevitably found in se...

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Detalles Bibliográficos
Autores principales: Lee, Juyoung, Lee, Song, Choi, Yongjun, Lee, Sangho
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051574/
https://www.ncbi.nlm.nih.gov/pubmed/36984723
http://dx.doi.org/10.3390/membranes13030336