Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System

Micro-electro-mechanical system (MEMS) scanning micromirrors are playing an increasingly important role in active structured light systems. However, the initial phase error of the structured light generated by a scanning micromirror seriously affects the accuracy of the corresponding system. This pa...

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Detalles Bibliográficos
Autores principales: Cheng, Xiang, Xu, Shun, Liu, Yan, Cao, Yingchao, Xie, Huikai, Ye, Jinhui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051696/
https://www.ncbi.nlm.nih.gov/pubmed/36984968
http://dx.doi.org/10.3390/mi14030561

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051696/
https://www.ncbi.nlm.nih.gov/pubmed/36984968
http://dx.doi.org/10.3390/mi14030561

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