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Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System
Micro-electro-mechanical system (MEMS) scanning micromirrors are playing an increasingly important role in active structured light systems. However, the initial phase error of the structured light generated by a scanning micromirror seriously affects the accuracy of the corresponding system. This pa...
Autores principales: | Cheng, Xiang, Xu, Shun, Liu, Yan, Cao, Yingchao, Xie, Huikai, Ye, Jinhui |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051696/ https://www.ncbi.nlm.nih.gov/pubmed/36984968 http://dx.doi.org/10.3390/mi14030561 |
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