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Tackling the Challenging Determination of Trace Elements in Ultrapure Silicon Carbide by LA-ICP-MS
The goal of accurately quantifying trace elements in ultrapure silicon carbide (SiC) with a purity target of 5N (99.999% purity) was addressed. The unsuitability of microwave-assisted acid digestion followed by Inductively Coupled Plasma Mass Spectrometry (ICP-MS) analysis was proved to depend mainl...
Autores principales: | , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051955/ https://www.ncbi.nlm.nih.gov/pubmed/36985816 http://dx.doi.org/10.3390/molecules28062845 |