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Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition
High-resolution micro- and nanostructures can be grown using Focused Electron Beam Induced Deposition (FEBID), a direct-write, resist-free nanolithography technology which allows additive patterning, typically with sub-100 nm lateral resolution, and down to 10 nm in optimal conditions. This techniqu...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10052145/ https://www.ncbi.nlm.nih.gov/pubmed/36991589 http://dx.doi.org/10.3390/s23062879 |