Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition

High-resolution micro- and nanostructures can be grown using Focused Electron Beam Induced Deposition (FEBID), a direct-write, resist-free nanolithography technology which allows additive patterning, typically with sub-100 nm lateral resolution, and down to 10 nm in optimal conditions. This techniqu...

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Detalles Bibliográficos
Autores principales: Escalante-Quiceno, Alix Tatiana, Novotný, Ondřej, Neuman, Jan, Magén, César, De Teresa, José María
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10052145/
https://www.ncbi.nlm.nih.gov/pubmed/36991589
http://dx.doi.org/10.3390/s23062879

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