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Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness

An aluminum nitride (AlN) piezoelectric micromachined ultrasound transducer (PMUT) array was proposed and fabricated for non-invasive radial artery stiffness monitoring, which could be employed in human vascular health monitoring applications. Using surface micromachining techniques, four hexagonal...

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Detalles Bibliográficos
Autores principales: Wu, Sheng, Liu, Kangfu, Wang, Wenjing, Li, Wei, Wu, Tao, Yang, Heng, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10052539/
https://www.ncbi.nlm.nih.gov/pubmed/36984946
http://dx.doi.org/10.3390/mi14030539