Design and Simulated Electrical Properties of a Proposed Implanted-Epi Silicon 3D-Spherical Electrode Detector

A new type of 3D electrode detector, named here as the Implanted-Epi Silicon 3D-Spherical Electrode Detector, is proposed in this work. Epitaxial and ion implantation processes can be used in this new detector, allowing bowl-shaped electrodes to penetrate the silicon completely. The distance between...

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Detalles Bibliográficos
Autores principales: Cai, Xinyi, Li, Zheng, Li, Xinqing, Tan, Zewen, Liu, Manwen, Wang, Hongfei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10052940/
https://www.ncbi.nlm.nih.gov/pubmed/36984958
http://dx.doi.org/10.3390/mi14030551

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10052940/
https://www.ncbi.nlm.nih.gov/pubmed/36984958
http://dx.doi.org/10.3390/mi14030551

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