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Selective-Area Growth Mechanism of GaN Microrods on a Plateau Patterned Substrate
This study provides experimental evidence regarding the mechanism of gallium nitride (GaN) selective-area growth (SAG) on a polished plateau-patterned sapphire substrate (PP-PSS), on which aluminum nitride (AlN) buffer layers are deposited under the same deposition conditions. The SAG of GaN was onl...
Autores principales: | Ahn, Min-joo, Jeong, Woo-seop, Shim, Kyu-yeon, Kang, Seongho, Kim, Hwayoung, Kim, Dae-sik, Jhin, Junggeun, Kim, Jaekyun, Byun, Dongjin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10053046/ https://www.ncbi.nlm.nih.gov/pubmed/36984342 http://dx.doi.org/10.3390/ma16062462 |
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