Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes

In this paper, we present a comprehensive study on the propagation and dispersion characteristics of A(1) mode propagating in Z-cut LiNbO(3) membrane. The A(1) mode resonators with pentagon spiral electrodes utilizing Z-cut lithium niobate (LiNbO(3)) thin film are designed and fabricated. The propos...

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Detalles Bibliográficos
Autores principales: Xie, Ying, Liu, Wenjuan, Cai, Yao, Wen, Zhiwei, Luo, Tiancheng, Liu, Yan, Sun, Chengliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10053681/
https://www.ncbi.nlm.nih.gov/pubmed/36984959
http://dx.doi.org/10.3390/mi14030552

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10053681/
https://www.ncbi.nlm.nih.gov/pubmed/36984959
http://dx.doi.org/10.3390/mi14030552

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