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Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes
In this paper, we present a comprehensive study on the propagation and dispersion characteristics of A(1) mode propagating in Z-cut LiNbO(3) membrane. The A(1) mode resonators with pentagon spiral electrodes utilizing Z-cut lithium niobate (LiNbO(3)) thin film are designed and fabricated. The propos...
Autores principales: | Xie, Ying, Liu, Wenjuan, Cai, Yao, Wen, Zhiwei, Luo, Tiancheng, Liu, Yan, Sun, Chengliang |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10053681/ https://www.ncbi.nlm.nih.gov/pubmed/36984959 http://dx.doi.org/10.3390/mi14030552 |
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