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Multi-Channel MEMS-FAIMS Gas Sensor for VOCs Detection

Aimed at the problems of a large equipment size, long time and high price of environmental VOC gas detection, the FAIMS-VOC gas sensor was designed and prepared according to the principle that the ionization energy of the common VOC gas is less than 10.6 eV. The sensor is small in size, fast in dete...

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Detalles Bibliográficos
Autores principales: Zhao, Zhujie, Lei, Cheng, Liang, Ting, Zhang, Junna, Liu, Yuqiao, Ghaffar, Abdul, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10053954/
https://www.ncbi.nlm.nih.gov/pubmed/36985016
http://dx.doi.org/10.3390/mi14030608