Micro- and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates

Micro- and nanostructures in vapor-phase-grown AlN on face-to-face annealed sputtered AlN (FFA Sp-AlN) templates formed on nanopatterned sapphire substrates (NPSS) were comprehensively analyzed using transmission electron microscopy. The comparison between metal–organic vapor-phase epitaxy-grown AlN...

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Detalles Bibliográficos
Autores principales: Nakanishi, Yudai, Hayashi, Yusuke, Hamachi, Takeaki, Tohei, Tetsuya, Nakajima, Yoshikata, Xiao, Shiyu, Shojiki, Kanako, Miyake, Hideto, Sakai, Akira
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2023
Materias:
Topical Collection: 19th Conference on Defects (DRIP XIX)
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10054194/
https://www.ncbi.nlm.nih.gov/pubmed/37363789
http://dx.doi.org/10.1007/s11664-023-10348-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10054194/
https://www.ncbi.nlm.nih.gov/pubmed/37363789
http://dx.doi.org/10.1007/s11664-023-10348-3

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