Research on MEMS Solid-State Fuse Logic Control Chip Based on Electrical Explosion Effect

A microelectromechanical systems (MEMS) solid-state logic control chip with three layers—diversion layer, control layer, and substrate layer—is designed to satisfy fuse miniaturization and integration requirements. A mathematical model is established according to the heat conduction equation, and th...

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Detalles Bibliográficos
Autores principales: Su, Wenting, Lou, Wenzhong, Feng, Hengzhen, Zhao, Yuecen, Lv, Sining, Kan, Wenxing, He, Bo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10054237/
https://www.ncbi.nlm.nih.gov/pubmed/36985102
http://dx.doi.org/10.3390/mi14030695

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10054237/
https://www.ncbi.nlm.nih.gov/pubmed/36985102
http://dx.doi.org/10.3390/mi14030695

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