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Research on MEMS Solid-State Fuse Logic Control Chip Based on Electrical Explosion Effect
A microelectromechanical systems (MEMS) solid-state logic control chip with three layers—diversion layer, control layer, and substrate layer—is designed to satisfy fuse miniaturization and integration requirements. A mathematical model is established according to the heat conduction equation, and th...
Autores principales: | Su, Wenting, Lou, Wenzhong, Feng, Hengzhen, Zhao, Yuecen, Lv, Sining, Kan, Wenxing, He, Bo |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10054237/ https://www.ncbi.nlm.nih.gov/pubmed/36985102 http://dx.doi.org/10.3390/mi14030695 |
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