Stiffness Considerations for a MEMS-Based Weighing Cell

In this paper, a miniaturized weighing cell that is based on a micro-electro-mechanical-system (MEMS) is discussed. The MEMS-based weighing cell is inspired by macroscopic electromagnetic force compensation (EMFC) weighing cells and one of the crucial system parameters, the stiffness, is analyzed. T...

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Detalles Bibliográficos
Autores principales: Wedrich, Karin, Cherkasova, Valeriya, Platl, Vivien, Fröhlich, Thomas, Strehle, Steffen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10054818/
https://www.ncbi.nlm.nih.gov/pubmed/36992053
http://dx.doi.org/10.3390/s23063342

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10054818/
https://www.ncbi.nlm.nih.gov/pubmed/36992053
http://dx.doi.org/10.3390/s23063342

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