Enhanced Light Extraction Efficiency by Self-Masking Technology with Carbonized Photoresist for Light-Emitting Diodes

This work investigates a self-masking technology for roughening the surface of light-emitting diodes (LEDs). The carbonized photoresist with a naturally nano/micro-textured rough surface was used as a mask layer. After growing the Si(3)N(4) passivation layer on LEDs, the texture pattern of the mask...

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Detalles Bibliográficos
Autores principales: Zhang, Xiu, Li, Shuqi, Wang, Baoxing, Chen, Baojin, Guo, Haojie, Yue, Rui, Cai, Yong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056249/
https://www.ncbi.nlm.nih.gov/pubmed/36984941
http://dx.doi.org/10.3390/mi14030534

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056249/
https://www.ncbi.nlm.nih.gov/pubmed/36984941
http://dx.doi.org/10.3390/mi14030534

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