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A Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Hollow Hemisphere Dielectric Layer

Capacitive pressure sensors based on porous structures have been widely researched and applied to a variety of practical applications. To date, it remains a big challenge to develop a capacitive pressure sensor with a high sensitivity and good linearity over a wide pressure range. In this paper, a s...

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Detalles Bibliográficos
Autores principales: Cui, Haoao, Liu, Yijian, Tang, Ruili, Ren, Jie, Yao, Liang, Cai, Yuhao, Chen, Da
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056648/
https://www.ncbi.nlm.nih.gov/pubmed/36985069
http://dx.doi.org/10.3390/mi14030662