Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope

In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes with the elliptic spokes. The degeneration of tw...

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Detalles Bibliográficos
Autores principales: Wang, Shihe, Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056927/
https://www.ncbi.nlm.nih.gov/pubmed/36991650
http://dx.doi.org/10.3390/s23062937

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056927/
https://www.ncbi.nlm.nih.gov/pubmed/36991650
http://dx.doi.org/10.3390/s23062937

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