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Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope
In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes with the elliptic spokes. The degeneration of tw...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056927/ https://www.ncbi.nlm.nih.gov/pubmed/36991650 http://dx.doi.org/10.3390/s23062937 |