Synthesis of Acrylate Dual-Tone Resists and the Effect of Their Molecular Weight on Lithography Performance and Mechanism: An Investigation

Acrylate photoresists have gained considerable attention in recent years owing to their high resolution, high sensitivity, and versality. In this work, a series of thermally stable copolymers are synthesized by introducing an isobornyl group, and well characterized using Fourier transform infrared s...

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Detalles Bibliográficos
Autores principales: Liu, Lifei, Li, Jintong, Song, Ting, Wu, Rong, Zhao, Weizhen, Huo, Feng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10057158/
https://www.ncbi.nlm.nih.gov/pubmed/36984212
http://dx.doi.org/10.3390/ma16062331

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10057158/
https://www.ncbi.nlm.nih.gov/pubmed/36984212
http://dx.doi.org/10.3390/ma16062331

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