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Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection
An enhanced MEMS capacitive sensor is developed for photoacoustic gas detection. This work attempts to address the lack of the literature regarding integrated and compact silicon-based photoacoustic gas sensors. The proposed mechanical resonator combines the advantages of silicon technology used in...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10057328/ https://www.ncbi.nlm.nih.gov/pubmed/36991990 http://dx.doi.org/10.3390/s23063280 |